Research Scientist - entegris

Position Description

RESEARCH SCIENTIST ♦ SEMICONDUCTOR MICROCONTAMINATION CONTROL 2007-PRESENT
ENTEGRIS ♦ SAN DIEGO, CA
Lead scientist in R&D to initiate the design and development of gas purification research projects. Coordinate product and design compatibility for new product technology transfer. Conduct extensive analysis of trace impurity in gases using GC’s, APIMS, FTIR and other methods.
• Provided competitive edge to gas purification system used in moisture removal from lithographic tools
• Developed key mass spectrometry method for trace moisture detection
• Developing GC method for <1 pptv (parts per trillion by volume) sulfur, hydrocarbon contamination detection
• Conducted direct comparison of state-of-the-art moisture detection technologies (Near-IR TDLAS and CDRS)
• Designed work breakdown structure (Microsoft Project 2003) for new generation gas purification system project
• Delivered critical gas purifier performance data for design of low-cost high flow gas purification system
• Direct experience with gas handling in ISO 9001 regulatory environment

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